Microheaters fabricated from a conducting composite

摘要

The authors report the fabrication of microheaters based on a conducting composite of silver microparticles embedded in polydimethylsioxane (PDMS). Experimental results show that the microheaters exhibit good performance in temperature rise and decay characteristics, with localized heating at targeted spatial domains. A unique feature of the microheater here is its excellent integration capability with biocompatible PDMS and other polymer materials, with potential microchip applications for bioprocessing and chemical reactions.