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Distributed Bragg reflector consisting of high- and low-refractive-index thin film layers made of the same material

机译:由相同材料制成的高折射率和低折射率薄膜层组成的分布式布拉格反射器

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摘要

A conductive distributed Bragg reflector (DBR) composed entirely of a single material—indium tin oxide (ITO)—is reported. The high- and low-refractive-index layers of the DBR are deposited by oblique-angle deposition and consist of ITO thin films with low and high porosities, which yield an index contrast of Δn=0.4. A single-material DBR with three periods achieves a reflectivity of 72.7%, in excellent agreement with theory.
机译:据报道,一种完全由单一材料氧化铟锡(ITO)组成的导电分布式布拉格反射器(DBR)。 DBR的高折射率层和低折射率层通过倾斜角沉积来沉积,并由具有低孔隙率和高孔隙率的ITO薄膜组成,其折射率差为Δn= 0.4。具有三个周期的单材料DBR达到72.7%的反射率,与理论非常吻合。

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