Use of zeolites in the capture of charged particles from plasma

摘要

The zeolites NaA and 13X were introduced to a coplanar discharge cell to investigate the behavior of charged particles from plasma. The zeolite crystals were attached to the surface without blocking their nanopores. The memory margin related to the accumulated charged particles on the surface indicated that the zeolites absorb charged particles. This phenomenon was also observed at the displacement and discharge current plots. Zeolites with a different window size cause abnormally high displacement and a saturation phenomenon of discharge currents. Note in particular that NaA seems to not only absorb charged particles but also capture gas molecules.