Anomalous optical switching and thermal hysteresis during semiconductor-metal phase transition of VO_2 films on Si substrate

摘要

We present a detailed infrared study of the semiconductor-to-metal transition (SMT) in a vanadium dioxide (VO_2) film deposited on silicon wafer. The VO_2 phase transition is studied in the mid-infrared region by analyzing the transmittance and the reflectance measurements, and the calculated emissivity. The reflectance has been measured in two configurations: from the side of the VO_2 film and from that of Si wafer. The results show a strong asymmetry between the emissivity in the two configurations, and the fact that the emissivity dynamic range from the silicon side is twice as large than that from the VO_2 side. The temperature behaviour of the emissivity during the SMT put into evidence the phenomenon of the anomalous absorption in VO2, which has been explained by applying the Maxwell Garnett effective medium approximation theory.