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Production of a 100-m-long high-quality graphene transparent conductive film by roll-to-roll chemical vapor deposition and transfer process

机译:通过卷对卷化学气相沉积和转移工艺生产100米长的高质量石墨烯透明导电膜

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摘要

A high-quality graphene transparent conductive film was fabricated by roll-to-roll chemical vapor deposition (CVD) synthesis on a suspended copper foil and subsequent transfer. While the high temperature required for the CVD synthesis of high-quality graphene has prevented efficient roll-to-roll production thus far, we used selective Joule heating of the copper foil to achieve this. Low pressure thermal CVD synthesis and a direct roll-to-roll transfer process using photocurable epoxy resin allowed us to fabricate a 100-m-long graphene transparent conductive film with a sheet resistance as low as 150 Ω/sq, which is comparable to that of state-of-the-art CVD-grown graphene films.
机译:通过在悬浮的铜箔上进行卷对卷化学气相沉积(CVD)合成并随后进行转印,可以制造出高质量的石墨烯透明导电膜。到目前为止,尽管CVD合成高质量石墨烯所需的高温阻止了有效的卷对卷生产,但我们还是通过选择性地对铜箔进行焦耳加热来实现这一目的。低压热CVD合成和使用光固化环氧树脂的直接卷对卷转移工艺使我们能够制造100m长的薄层电阻低至150Ω/ sq的石墨烯透明导电膜最新的CVD生长石墨烯薄膜。

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  • 来源
    《Applied Physics Letters》 |2013年第2期|023112.1-023112.4|共4页
  • 作者单位

    Advanced Materials Laboratories, Sony Corporation, Atsugi-Shi, Kanagawa 243-0014, Japan;

    Advanced Materials Laboratories, Sony Corporation, Atsugi-Shi, Kanagawa 243-0014, Japan;

    Advanced Materials Laboratories, Sony Corporation, Atsugi-Shi, Kanagawa 243-0014, Japan;

    Advanced Materials Laboratories, Sony Corporation, Atsugi-Shi, Kanagawa 243-0014, Japan;

    Advanced Materials Laboratories, Sony Corporation, Atsugi-Shi, Kanagawa 243-0014, Japan;

    Advanced Materials Laboratories, Sony Corporation, Atsugi-Shi, Kanagawa 243-0014, Japan;

    Advanced Materials Laboratories, Sony Corporation, Atsugi-Shi, Kanagawa 243-0014, Japan;

    Advanced Materials Laboratories, Sony Corporation, Atsugi-Shi, Kanagawa 243-0014, Japan;

    Advanced Materials Laboratories, Sony Corporation, Atsugi-Shi, Kanagawa 243-0014, Japan;

    Advanced Materials Laboratories, Sony Corporation, Atsugi-Shi, Kanagawa 243-0014, Japan;

    Advanced Materials Laboratories, Sony Corporation, Atsugi-Shi, Kanagawa 243-0014, Japan;

    Advanced Materials Laboratories, Sony Corporation, Atsugi-Shi, Kanagawa 243-0014, Japan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
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  • 正文语种 eng
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