Correlation between laser absorption and radiation conversion efficiency in laser produced tin plasma

摘要

The correlation between the laser absorption and the conversion efficiency (CE) for 13.5nm extreme ultraviolet (EUV) light in a laser-produced tin plasma was investigated. The absorption rate a and the CE were measured simultaneously for a laser-pre-formed low-density tin target as a function of the time delay between the pre-pulse and the main laser pulse. A clear and positive correlation between α and CE was found with increasing delay time; however, the CE decreases rapidly at longer delay times. This result is partly attributed to a reduction in the absorption rate, but is mainly attributed to the self-absorption of EUV light in excessively long-scale plasmas.