Room temperature, very sensitive thermometer using a doubly clamped microelectromechanical beam resonator for bolometer applications

摘要

We propose a room temperature, all electrical driving and detecting, very sensitive thermometer structure using a microelectromechanical (MEMS) resonator for bolometer applications. We have fabricated a GaAs doubly clamped MEMS beam resonator whose oscillation can be excited and detected by the piezoelectric effect. When a heating power is applied to a NiCr film deposited on the MEMS beam surface, internal thermal stress is generated in the beam, leading to a reduction in the resonance frequency. The present device detects the shift in the resonance frequency caused by heating and works as a very sensitive thermometer. When the resonator was driven by a voltage slightly below the threshold for the nonlinear, hysteretic oscillation, the thermometer showed a voltage responsivity of about 3300 V/W, while keeping a low noise spectral density of about 60nV/Hz~(1/2), demonstrating a noise equivalent power of ＜20pW/Hz~(1/2) even at room temperature. The observed effect can be used for realizing high-sensitivity terahertz bolometers for room-temperature operation.