Superharmonic resonances in a two-dimensional non-linear photonic-crystal nano-electro-mechanical oscillator

摘要

We investigate the non-linear mechanical dynamics of a nano-optomechanical mirror formed by a suspended membrane pierced by a photonic crystal. By applying to the mirror a periodic electrostatic force induced by interdigitated electrodes integrated below the membrane, we evidence superharmonic resonances of our nano-electro-mechanical system; the constant phase shift of the oscillator across the resonance tongues is observed on the onset of principal harmonic and subhar-monic excitation regimes.