Application of windowless energy dispersive spectroscopy to determine Li distribution in Li-Si alloys

摘要

The composition of Li-Si alloys in a lithiated single crystal Si(111) was studied using windowless energy dispersive spectroscopy (EDS), scanning electron microscopy (SEM), and soft X-ray emission spectroscopy (SXES). The intensities of Li K-alpha and Si L-2,L-3 were obtained after deconvolution of the windowless EDS spectra. The Li K-alpha, Si L-2,L-3, and Si K-alpha intensity changes along a line scan revealed a clear layered structure with varied Li concentrations. The Li distribution in Li-Si alloys was obtained by windowless EDS through the X-ray emission intensity change analysis. In addition, it was found the Li concentration decreases gradually within the 3rd alloy layer by combining the analysis of windowless EDS and SXES. The thickness of each Li-Si layer could be precisely determined, even for the 3rd layer which cannot be observed clearly by SEM. Published by AIP Publishing.