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Wafer Bump Reflow

机译:晶圆凸点回流

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摘要

Preventing and reducing oxidation of bumped wafers during reflow is essential to the success of wafer-level packaging. Both the flux and the hydrogen reflow process are effective for oxide prevention and reduction. Currently, the flux process has presented its users with environmental risks, cleanliness problems and higher operational costs due to added equipment and personnel, as well as the disposal of hazardous waste. The hydrogen reflow process has been shown to be completely safe, clean and cost-effective. End users who use this process have demonstrated high process yields.
机译:防止和减少回流期间凸块晶圆的氧化对于晶圆级封装的成功至关重要。助熔剂和氢回流工艺对于防止和还原氧化物都是有效的。当前,助焊剂工艺由于增加的设备和人员以及危险废物的处理而给用户带来环境风险,清洁问题和更高的运营成本。氢气回流工艺已被证明是完全安全,清洁且具有成本效益的。使用此过程的最终用户显示出很高的过程产量。

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