Precision wearable accelerometer contact microphones for longitudinal monitoring of mechano-acoustic cardiopulmonary signals

摘要

conceptual representation of encapsulated sensor positioned on the on the chest wall (blue circle) to simultaneously monitor heart rate, heart sounds, respiratory rate, breath sounds along with body motion and position. The exploded view displays the fabricated microsensor (2 × 2 × 1 mm) and its cross-sectional view showcasing enabling technology of high aspect-ratio (>150), ultra-thin 270 nm capacitive gap, SEM of uncapped accelerometer contact microphone (ACM) device. The proof mass anchored on the side using torsional tethers COMSOL Multiphysics simulation illustrating the operational mode shape of the sensor and showcasing the location of torsional tethers and sense electrodes transducer response to normally applied acceleration with measured sensitivity of 76 mV/g and cross-axis sensitivity lower than 3%, Allan deviation plot exhibiting low-noise performance of 127 µg/√Hz.