首页> 美国卫生研究院文献>Journal of Visualized Experiments : JoVE >Scalable Solution-processed Fabrication Strategy for High-performance Flexible Transparent Electrodes with Embedded Metal Mesh
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Scalable Solution-processed Fabrication Strategy for High-performance Flexible Transparent Electrodes with Embedded Metal Mesh

机译:具有嵌入式金属网的高性能柔性透明电极的可扩展解决方案处理制造策略

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摘要

Here, the authors report the embedded metal-mesh transparent electrode (EMTE), a new transparent electrode (TE) with a metal mesh completely embedded in a polymer film. This paper also presents a low-cost, vacuum-free fabrication method for this novel TE; the approach combines lithography, electroplating, and imprint transfer (LEIT) processing. The embedded nature of the EMTEs offers many advantages, such as high surface smoothness, which is essential for organic electronic device production; superior mechanical stability during bending; favorable resistance to chemicals and moisture; and strong adhesion with plastic film. LEIT fabrication features an electroplating process for vacuum-free metal deposition and is favorable for industrial mass production. Furthermore, LEIT allows for the fabrication of metal mesh with a high aspect ratio (i.e., thickness to linewidth), significantly enhancing its electrical conductance without adversely losing optical transmittance. We demonstrate several prototypes of flexible EMTEs, with sheet resistances lower than 1 Ω/sq and transmittances greater than 90%, resulting in very high figures of merit (FoM) – up to 1.5 x 104 – which are amongst the best values in the published literature.
机译:在这里,作者报告了嵌入式金属网透明电极(EMTE),这是一种新的透明电极(TE),其金属网完全嵌入聚合物膜中。本文还提出了这种新型TE的低成本,无真空制造方法。该方法结合了光刻,电镀和压印转移(LEIT)处理。 EMTE的嵌入式特性具有许多优势,例如高表面光滑度,这对于有机电子设备的生产至关重要。弯曲过程中优异的机械稳定性;良好的耐化学腐蚀性和耐湿性;与塑料膜的牢固粘合。 LEIT制造采用电镀工艺实现无真空的金属沉积,有利于工业批量生产。此外,LEIT允许制造具有高纵横比(即,厚度与线宽)的金属网,从而显着提高其电导率而不会不利地损失光学透射率。我们演示了几种挠性EMTE的原型,其薄层电阻低于1Ω/ sq,透射率大于90%,从而产生非常高的品质因数(FoM)–高达1.5 x 10 4 –是已出版文献中的最佳价值之一。

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