Periodic Nonlinear Error Analysis and Compensation of a Single-Excited Petal-Shaped Capacitive Encoder to Achieve High-Accuracy Measurement

摘要

The measurement results of a single-excitation petal-shaped capacitive encoder show strong periodic characteristics for nonlinear errors. This paper presents the analysis of periodic nonlinear errors in a single-excitation petal-shaped encoder in terms of three main aspects—sensitive structure processing error, circuit demodulation error, and installation error. Analytical and simulation results confirm that the first-, second-, and fourth-periodic electrical errors are caused by the misalignment of circuit parameters, non-uniform segmentation of the processing error, and cross interference of the electric field, respectively. Further experimental investigation reveals that the mechanical periodic error is caused by installation misalignment. Based on these analytical, simulation, and experimental results, the design of the capacitive encoder was optimized and a method based on harmonic components was applied to compensate the periodic nonlinear error of the encoder. Measurement results shows that the prototype which has 180 petal-shaped numbers can achieve a reduction of periodic nonlinear errors to less than 0.02° and its accuracy can be improved to 0.0006° after compensation over the full measurement range.