Application of Flexible Four-In-One Microsensor to Internal Real-Time Monitoring of Proton Exchange Membrane Fuel Cell

摘要

In recent years, the development of green energy sources, such as fuel cell, biomass energy, solar energy, and tidal energy, has become a popular research subject. This study aims at a flexible four-in-one microsensor, which can be embedded in the proton exchange membrane fuel cell (PEMFC) for real-time microscopic diagnosis so as to assist in developing and improving the technology of the fuel cell. Therefore, this study uses micro-electro-mechanical systems (MEMS) technology to integrate a micro humidity sensor, micro pH sensor, micro temperature sensor, and micro voltage sensor into a flexible four-in-one microsensor. This flexible four-in-one microsensor has four functions and is favorably characterized by small size, good acid resistance and temperature resistance, quick response, and real-time measurement. The goal was to be able to put the four-in-one microsensor in any place for measurement without affecting the performance of the fuel cell.