Study of the Wavelength Dependence in Laser Ablation of Advanced Ceramics and Glass-Ceramic Materials in the Nanosecond Range

摘要

In this work, geometrical dimensions and ablation yields as a function of the machining method and reference position were studied when advanced ceramics and glass-ceramic materials were machined with pulsed lasers in the nanosecond range. Two laser systems, emitting at 1064 and 532 nm, were used. It was shown that the features obtained depend on whether the substrate is processed by means of pulse bursts or by grooves. In particular, when the samples were processed by grooves, machined depth, removed volume and ablation yields reached their maximum, placing the sample out of focus. It was shown that these characteristics do not depend on the processing conditions, the wavelength or the optical configuration, and that this is intrinsic behavior of the processing method. Furthermore, the existence of a close relation between material hardness and ablation yields was demonstrated.