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Writingon Nanocrystals: Patterning Colloidal InorganicNanocrystal Films through Irradiation-Induced Chemical Transformationsof Surface Ligands

机译:写作在纳米晶体上:图案化无机胶体通过辐照诱导化学转化的纳米晶体薄膜表面配体

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摘要

In the past couple of decades, colloidal inorganic nanocrystals (NCs) and, more specifically, semiconductor quantum dots (QDs) have emerged as crucial materials for the development of nanoscience and nanotechnology, with applications in very diverse areas such as optoelectronics and biotechnology. Films made of inorganic NCs deposited on a substrate can be patterned by e-beam lithography, altering the structure of their capping ligands and thus allowing exposed areas to remain on the substrate while non-exposed areas are redispersed in a solvent, as in a standard lift-off process. This methodology can be described as a “direct” lithography process, since the exposure is performed directly on the material of interest, in contrast with conventional lithography which uses a polymeric resist as a mask for subsequent material deposition (or etching). A few reports from the late 1990s and early 2000s used such direct lithography to fabricate electrical wires from metallic NCs. However, the poor conductivity obtained through this process hindered the widespread use of the technique.In the early 2010s, the same method was used to define fluorescentpatterns on QD films, allowing for further applications in biosensing.For the past 2–3 years, direct lithography on NC films withe-beams and X-rays has gone through an important development as ithas been demonstrated that it can tune further transformations onthe NCs, leading to more complex patternings and opening a whole newset of possible applications. This Perspective summarizes the findingsof the past 20 years on direct lithography on NC films with a focuson the latest developments on QDs from 2014 and provides differentpotential future outcomes of this promising technique.
机译:在过去的几十年中,胶体无机纳米晶体(NCs),更具体地说是半导体量子点(QDs)成为了纳米科学和纳米技术发展的关键材料,并在光电子和生物技术等非常广泛的领域中得到了应用。可以通过电子束光刻对由沉积在基板上的无机NC制成的膜进行图案化,从而改变其封端配体的结构,从而使曝光区域保留在基板上,而未曝光区域则重新分散在溶剂中。升空过程。与使用聚合物抗蚀剂作为掩模进行后续材料沉积(或蚀刻)的常规光刻法相比,此曝光方法可被描述为“直接”光刻工艺,因为曝光是直接在目标材料上进行的。 1990年代末和2000年代初的一些报道使用这种直接光刻技术从金属NC中制造电线。然而,通过该方法获得的差的导电性阻碍了该技术的广泛使用。在2010年代初期,使用相同的方法定义荧光QD胶片上的图案,从而可以进一步应用于生物传感。在过去的2-3年中,采用电子束和X射线在经历了重要发展之后已经证明它可以调整进一步的转换NC,导致更复杂的图案并开辟了一个全新的领域可能的应用程序集。本观点总结了研究结果过去20年中对NC胶片直接光刻的关注关于2014年QD的最新进展,并提供了不同的这种有前途的技术的潜在未来结果。

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