激活能真空自动测试系统的研发

摘要

为提高激活能测量的精度,采用全封闭金属钟罩避免光的干扰,用环形包覆加热腔和保温隔热盒的方法测量温度,在自然冷却时测量电流来避免交流信号对弱信号的干扰,采用吉时利K617静电计获得了8 fA的测量精度.通过PLC和LabVIEW软件编程,实现了激活能真空测试的自动控制,不重复性小于2%,并给出了部分材料的激活能测试值.%In order to improve the accuracy of measurement of activation energy,a fully enclosed metal bell is used to avoid the interference of light. To measure the temperature of sample,a ring like heating chamber and a thermal insulation box are introduced. To avoid the interference of AC signal to the weakly signal,a method of natural cooling is applied. There is an accuracy of 8 fA taken by Keithley K617 electrostatic. There are some software programs to automatic control the test of activation energy with the PLC and LabVIEW program languages. The non-repeatability is less than 2%. There are some data of activation energy is given for several materials.