大直径单晶硅棒径向电阻率均匀性的控制

摘要

Through the different process control parameters and different cooling methods on single crystal head, radial resistivity uniformity, the experimental results show that increasing crystal rotation rate and crucible rotation rate, can make the solid liquid interface from the upward movement of high temperature flow increases, rise to inhibit heat convection function, improve the resistance rate of radial uniformity.%通过不同工艺拉制参数和不同冷却方式，研究了单晶头部径向电阻率的均匀性，实验结果表明，提升晶转和埚转后，会使固液界面从下向上运动的高温流增大，起到抑制热对流的作用，提高电阻率的径向均匀性。