非制冷红外焦平面高灵敏像元微桥设计

摘要

介绍了硅微桥结构的传热物理模型及其理论计算方法.提出一种厚膜像元尺寸为360μm×360μm,具有"桌形"绝热框架支撑的微桥结构像元,用有限元分析证明其有较小的热导G,能获得很高的响应率.微桥结构在非制冷红外焦平面(UFPA)单元探测器中起着力学支撑、热隔离和电连接的作用,其品质优劣直接影响着UFPA器件的成像性能.%The physical mode and theory of the heat transfer in micro-bridge structure are introduced. A kind of micro-bridge pixel is provided with thick-film pixel size of 360 μm×360μm and" desk-type" adiabatic frame support, and the analysis results by FEM show that the thermal conductivity G is small and high response rate can be obtained. The micro-bridge structure plays an important role in the mechanical support, thermal isolation and electrical connection for the UFPA detector,the quality of which has a direct effect on the imaging performance of the UFPA detector.