基于MEMS三相栅式位移传感器信号调理电路设计

摘要

Signal conditioning circuit of MEMS-based three-phase grating type displacement sensor is designed based on its measuring principle and output signal. The conditioning circuit consists of differential pre-amplifier, band-pass fountainhead filter and waveform converting circuit. In order to improve the detection sensitivity and signal noise ration,the non-linear amplification is used in design of waveform converting circuit. Reading stability of the measurement system of displacement can be as good as l",that means the conditioning circuit has a good stability to meet the needs of measurement.%根据基于微机电系统(MEMS)的三相栅式位移传感器测量原理和输出信号特点,设计了一种信号调理电路.该电路主要由差分前置放大电路、带通有源滤波器和波形变换电路组成.波形变换电路设计采用了非线性放大方法来提高信噪比和检测灵敏度.以此信号调理电路搭建的位移测量系统读数稳定性达到1″,表明该电路稳定性达到测量要求.