The technique of ion plating was introduced by Mattox[1] in 1963. All PVD techniques used for the deposition of hard wear resistant coatings for tribological applications rely on the ion bombardment of the coating during deposition in order to obtain the required coating properties and are all variations of the original ion plating technique. To obtain a dense, hard, wear resistant coating the ion current density during deposition needs to be high, more than 1 mA/cm2 and the energy of the ions should be not more than about 50 eV.……
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