溶胶-凝胶旋转涂布法制备的多孔纳米二氧化钛膜的结构和光学性能

摘要

Three thicknesses of TiO2 films,174,195,and 229 nm,were deposited onto quartz substrates by sol-gel spin coating method.The as-deposited thin films were characterized by nano-crystallite with different sizes(19-46 nm)and relatively high porous structure.Optical constants were determined and showed the lowest refractive index of 1.66 for the as-prepared films that ever reported till now.Obtained results were discussed through current theoretical ideas.%采用溶胶-凝胶旋转涂布技术在石英基质上沉积三种不同厚度的TiO2薄膜,其厚度分别为174、195和229 nm.沉积得到的薄膜是由尺寸为19～46 nm的纳米微晶组成的,并具有较高的多孔结构.测定了薄膜的光学常数,得到了迄今为止报道的最低折射率1.66,并对所得结果进行了讨论.