采用中频磁控溅射结合离子束混合技术在不锈钢基体上制备C-SiC涂层。对制备的涂层进行能量5 keV、剂量1×1018 ions/cm2的氢离子注入,模拟涂层阻止氢渗透。之后，分别将样品从273 K加入到1173 K。采用SEM、XPS和 SIMS分析表面形貌、表面成分及各元素的深度分布。结果表明，不同温度的加热处理使涂层的成分发生变化，在723 K以下温度处理时，C-50%SiC涂层仍能保持非常好的氢阻止性能，在1023 K以上温度处理时，涂层不再具有阻氢性能。%C-SiC coatings were prepared on stainless steel substrate by the middle frequency magnetron sputtering (MFMS) and ion beam mixing technique. After deposition, these samples were implanted by 5 keV hydrogen ion beam at a dose of 1×1018 ion/cm2. Some samples were heat treated at different temperatures from 273 K to 1173 K separately. The surface morphology, surface concentration of the elements of the C-SiC coatings and element iron from substrate as well as their depth profiles were checked with SEM, XPS and SIMS analyses. The results show that the composition of the coatings is changed due to heat treatment at different temperatures. The C-50%SiC coating with an excellent hydrogen resistant property can act as hydrogen barrier at the temperature below 723 K. But the hydrogen resistant property of the coating becomes bad when it is used at the temperature of 1023 K.
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