平面应变鼓包实验测量薄膜力学性能的精度分析

摘要

采用有限元法系统地研究了平面应变鼓包实验中鼓包尺寸、薄膜初始条件以及材料参数对薄膜变形行为的影响。然后，根据有限元结果，分析平面应变鼓包实验测量薄膜力学性能的精度。结果表明：尽管原有的平面应变鼓包理论模型测量平面应变模量的精度很高，但是依其测量残余应力的精度并不高，尤其是在低残余应力阶段。最后，根据上述情况，提出一种新的分析鼓包实验数据的方法以提高平面应变鼓包技术的精度和可靠性。%The effect of a variety of geometrics, initial conditions and material properties on the deformation behavior of thin films in the plane-strain bulge test was systematically scrutinized by performing the finite element analysis, and then the accuracy of the plane-strain bulge test in determining the mechanical properties of thin films in terms of our finite element results was analyzed. The results indicate that although the determination of the plane-strain modulus in the light of the plane-strain bulge equation is fairly accurate, the calculation of the residual stress is not satisfied as expected, especially for low residual stress. Finally, an approach is proposed for analyzing bulge test data, which will improve the accuracy and reliability of this bulge test technique.