Large Thrust Trans-scale Precision Positioning Stage Based on Inertial Stick-Slip Driving

摘要

For the smaller thrust,it is difficult to achieve 3Dtrans-scale precision positioning based on previous stick-slip driving.A large thrust trans-scale precision positioning stage is studied based on the inertial stick-slip driving.The process of the movement is divided into two steps,i.e.,the″sliding″phase and the″stickness″phase.In the whole process,the kinematics model of the inertial stick-slip driving is established,and it reveals some factors affecting the velocity of inertial stick-slip driving.Furthermore,a simulation of movement is preformed by Matlab-Simulink software,and the whole process of the inertial stick-slip driving is displayed.After one experimental prototype is designed,the back and forth velocity is tested.Finally,the simulation verifies the accuracy of the kinematics model.