Diameters of morphology zones of crater processed by femtosecond laser were measured in the range of laser fluence from 0. 108 J/cm to 28. 68 J/cm . Thermal melting on the surface of a hole and the heat conduction rule were studied. The melting zones were calculated according to the traditional thermal conduction formula. The calculated results matched with the experiment results very well. It suggested that the thermal diffusion in super power femtosecond laser micromachining was inevitable. Besides, reasonable parameters were acquired for the better quality of the micro-holes.%对飞秒激光能量密度为0.108～28.68 J/cm2范围内加工的硅孔表面形貌尺寸进行分析,同时对热传递现象进行研究.理论分析了飞秒激光加工区域热传导时间及温度分布,并将其与实验测量值进行对比,验证了热影响的存在.通过理论与实验分析说明了在高能量飞秒激光加工中热传递现象不可避免,并获得了较好的孔加工质量的激光能量合理参数.
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