In the view of the structure of electrode for glow plasma discharge non -hydrogen carburization on titanium sur-face, to get an optimized electrode structure size , the effect of electron in plasma on glow discharge was analyzed , and the distance between the carbon source and titanium workpiece , the size of the workpiece and source , as well as the dis-charge gas pressure were calculated and optimized .The results show that when the distance between the carbon source and the titanium workpiece is 20~40 mm, the sizes of the workpiece and source size are larger than 20 mm and 40 mm respectively , and the discharge gas pressure is larger than 20 Pa, the electron uncollided probability is almost zero , which can achieve high efficiency sputtering with graphite source , and the experiment is conducted to verify the results .%针对钛表面辉光无氢渗碳技术中的电极结构,通过对辉光放电状态下等离子体中电子的作用分析,计算并优化了石墨源极与钛工件极距离、 工件极和源极尺寸以及放电气体压力的数值,得出源极与工件极距离为20~40 mm,工件极的尺寸大于20 mm,源极的尺寸大于40 mm,放电气体分压大于20 Pa时,可以使电子未碰撞及几率几乎为零,能够实现石墨源极的高效溅射,并通过试验对上述结果进行了论证.
展开▼
