Laser inducted breakdown spectroscopy (LIBS) technology has been used widely for the multi-element analysis of different samples and also an effective way to realize the spectroscopy diagnosis applied to calculating the electron temperature and vibration-rotation temperature etc of some certain elements. It is a highly effective measurement for its non-contact and nondestructive on-line analysis with the help of a high-speed response CCD camera. In the present paper, the authors tested an alley though LIBS technology to determine its elements in terms of species and quantities and also discussed some influences of the incident angle and the power changes of the laser beam as well as the measurement distance changes on the experimental results and and gave appropriate theoretical explanation.%激光诱导击穿光谱法(LIBS)在精准识别该样品元素的组成成分和含量的同时,也可以得到该特征元素等离子体的电子温度、粒子旋转温度等相关光谱诊断参数.该方法非接触式、低损伤阈值,借助高速高分辨率响应的CCD探测元件更可以实现实时动态测量.文章基于LIBS的相关原理,对一块事先标定好元素成分的合金进行光谱诊断的同时,发现在改变激光入射角度、激光入射功率和接收端面到测试样品的距离对实验结果将会产生重要的影响.由实验结果表明,利用LIBS不仅可以精准的分析测试对象的元素成分和含量,同时也定量分析了以上实验条件和参数的变化对实验结果的影响并给出相应的理论依据与解释.
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