Size Control of Nanoscale Silicon Particles Formed in Thermally Annealed A-Si∶H Films and Its Photoluminescence

摘要

A method to control the size of nanoscale silicon grown in thermally annealed hydrogenated amorphous silicon (a-Si : H) films is reported. Using the characterizing techniques of micro-Raman scattering,X-ray diffraction and computer simulation, it is found that the sizes of the formed silicon particles change with the temperature rising rate in thermally annealing the a-Si : H films. When the a-Si: H films have been annealed with high rising rate( ～ 100 C/s), the sizes of nanoscale silicon particles are in the range of 1.6～ 15nm. On the other hand, if the a-Si: H films have been annealed with low temperature rising rate(～1 C/s),the sizes of nanoscale silicon particles are in the range of 23～46 nm. Based on the theory of crystal nucleation and growth, the effect of temperature rising rate on the sizes of the formed silicon particles is discussed. Under high power laser irradiation, in situ nanocrystallization and subsequent nc-Si clusters are small enough for visible light emission, authors have not detected any visible photoluminescence(PL) from these nc-Si clusters before surface passivation. After electrochemical oxidization in hydrofluoric acid, however, intense red PL has been detected. Cyclic hydrofluoric oxidization and air exposure can cause subsequent blue shift in the red emission. The importance of surface passivation and quantum confinement in the visible emissions has been discussed.