CdS microcrystallite doped SiO 2 glass films on titanium metal substrates were prepared by sol gel process. The effects of solution composition and viscosity, heat treatment parameters and substrate pretreatment method on the film qualities were studied. The transformation process of gel to CdS doped SiO 2 glass film, the structure of these films, the substrate/film interface bonding state and crystalline phase were analyzed by DTA, IRRS, SEM, EDS and XRD. The IRRS results show that Si O Ti linkages are formed between titanium substrate and thin film during heat treatment process. The preferential heat treatment of titanium surface in oxidizing atmosphere will be beneficial to increase the interface bonding strength. The thin films bonded with the substrates chemically and contained very fine CdS crystals with 20~40 nm in size.
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