Magnetic probe diagnostics of nonlinear standing waves and bulk ohmic electron power absorption in capacitive discharges

摘要

It is recognized that standing wave effects appearing in large-area,very-high-frequency capacitively coupled plasma(CCP)reactors cause center-high plasma non-uniformity.Using a high-frequency magnetic probe,we present a direct experimental diagnostic of the nonlinear standing waves and bulk ohmic electron power absorption dynamics in low pressure CCP discharges for different driving frequencies of 13.56,30,and 60 MHz.The design,principle,calibration,and validation of the probe are described in detail.Spatial structures of the harmonics of the magnetic field,determined by the magnetic probe,were used to calculate the distributions of the harmonic current and the corresponding ohmic electron power deposition,providing insights into the behavior of nonlinear harmonics.At a low driving frequency,i.e.13.56 MHz,no remarkable nonlinear standing waves were identified and the bulk ohmic electron power absorption was observed to be negligible.The harmonic magnetic field/current was found to increase dramatically with the driving frequency,due to decreased sheath reactance and more remarkable nonlinear standing waves at a higher driving frequency,leading to the enhancements of the ohmic heating and the plasma density in the bulk,specifically at the electrode center.At a high driving frequency,i.e.60 MHz,the high-order harmonic current density and the corresponding ohmic electron power absorption exhibited a similar node structure,with the main peak on axis,and one or more minor peaks between the electrode center and the edge,contributing to the center-high profile of the plasma density.