Pulsed dielectric barrier discharge is a promising technology for ozone generation and is drawing increasing interest. To overcome the drawback of experimental investigation, a kinetic model is applied to numerically investigate the effect of gas parameters including inlet gas temperature,gas pressure, and gas flow rate on ozone generation using pulsed dielectric barrier discharge. The results show that ozone concentration and ozone yield increase with decreasing inlet gas temperature, gas pressure, and gas flow rate. The highest ozone concentration and ozone yield in oxygen are about 1.8 and 2.5 times higher than those in air, respectively. A very interesting phenomenon is observed: the peak ozone yield occurs at a lower ozone concentration when the inlet gas temperature and gas pressure are higher because of the increasing average gas temperature in the discharge gap as well as the decreasing reduced electric field and electron density in the microdischarge channel. Furthermore, the sensitivity and rate of production analysis based on the specific input energy(SIE) for the four most important species O_3, O,O(1D), and O_2(b!1∑) are executed to quantitatively understand the effects of every reaction on them, and to determine the contribution of individual reactions to their net production or destruction rates. A reasonable increase in SIE is beneficial to ozone generation. However,excessively high SIE is not favorable for ozone production.
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