Microstructure, Hardness and Corrosion Resistance of ZrN Films Prepared by Inductively Coupled Plasma Enhanced RF Magnetron Sputtering

著录项

• 来源
  《等离子体科学和技术（英文版）》 |2008年第2期|170-175|共6页
• 作者

  LIU Feng; MENG Yuedong; REN Zhaoxing; SHU Xingsheng;

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• 作者单位

  Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China;

  Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China;

  Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China;

  Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China;

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• 原文格式 PDF
• 正文语种 chi
• 中图分类
• 关键词