Key Laboratory of Radiation Physics and Technology of Ministry of Education;
Institute of Nuclear Science and Technology;
Sichuan University;
State Key Laboratory of Transient Optics and Photonics;
Xi'an Institute of Optics and Precision Mechanics;
CAS;
State-key Laboratory for Mechanical Behavior of Materials;
Xi'an Jiaotong University;
界面粘结强度; 热稳定性; SiOC; 膜表面; 等离子体处理; 堆栈; 铜; 薄膜;