In this paper, we reported nano-scale SiOx coatings deposited on polyethylene terephthalate(PET) webs by microwave surface-wave assisted plasma enhanced chemical vapor deposition for the purpose of improving their barrier properties. Oxygen(O2) and hexamethyldisiloxane(HMDSO) were employed as oxidant gas and Si monomer during SiOx deposition, respectively. Analysis by Fourier transform infrared spectroscope(FTIR) for chemical structure and observation by atomic force microscopy(AFM) for surface morphology of SiOx coatings demonstrated that both chemical compounds and surface feature of coatings have a remarkable influence on the coating barrier properties. It is noted that the processing parameters play a critical role in the barrier properties of coatings. After optimization of the SiOx coatings deposition conditions, i.e. the discharge power of 1500 W, 2 : 1 of O2 : HMDSO ratio and working pressure of 20 Pa, a better barrier property was achieved in this work.
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