Balmer H_α,H_β and H_γ Spectral Lines Intensities in High-Power RF Hydrogen Plasmas

摘要

H_α(Balmer-alpha),H_β(Balmer-beta)and H_γ(Balmer-gamma)spectral line intensities in atomic hydrogen plasma are investigated by using a high-power RF source.The intensities of the H_α,H_βand H_γ,spectral lines are detected by increasing the input power(0-6 kW)of ICPs(inductively coupled plasmas).With the increase of net input power,the intensity of H_αimproves rapidly(0-2 kW),and then reaches its dynamic equilibrium;the intensities of H_βcan be divided into three processes:obvious increase(0-2 kW),rapid increase(2-4 kW),almost constant(4-6 kW);while the intensities of H_γincrease very slowly.The energy levels of the excited hydrogen atoms and the splitting energy levels produced by an obvious Stark effect play an important role in the results.