软 X射线光学表面散射检测

摘要

The soft X‐ray scattering distributions of several mirrors were measured by a self‐made soft X‐ray reflectometer for different wavelengths and grazing angles .The experimental results indica‐ted that the soft X‐ray surface scattering increased with increasing grazing angle and surface rough‐ness ,but decreased with increasing wavelength .%应用自行研制的软X射线反射率计，分别对不同的反射镜样品，在不同的工作波段以及掠射角下研究了软X射线波段掠入射光学表面的散射。实验结果表明：掠射角增加，波长减小，粗糙度增加，软X射线掠入射表面散射程度加重。