Pressure Sensor Based on the Fiber-Optic Extrinsic Fabry-Perot Interferometer

摘要

Pressure sensors based on fiber-optic extrinsic Fabry-Perot interferometer(EFPI)have been extensively applied in various industrial and biomedical fields.In this paper,some key improvements of EFPI-based pressure sensors such as the controlled thermal bonding technique,diaphragm-based EFPI sensors,and white light interference technology have been reviewed.Recent progress on signal demodulation method and applications of EFPI-based pressure sensors has been introduced.Signal demodulation algorithms based on the cross correlation and mean square error(MSE)estimation have been proposed for retrieving the cavity length of EFPI.Absolute measurement with a resolution of 0.08 nm over large dynamic range has been carried out.For downhole monitoring,an EFPI and a fiber Bragg grating(FBG)cascade multiplexing fiber-optic sensor system has been developed,which can operate in temperature 300°Cwith a good long-term stability and extremely low temperature cross-sensitivity.Diaphragm-based EFPI pressure sensors have been successfully used for low pressure and acoustic wave detection.Experimental results show that a sensitivity of 31 mV/Pa in the frequency range of 100 Hz to 12.7 kHz for aeroacoustic wave detection has been obtained.