State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem ,Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem ,Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem ,Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem ,Information Technology, Chinese Academy of Sciences, Shanghai 200050, China;
micromachined gyroscope; slide film damping; design simulation;