多通道柔性神经微电极加工工艺

摘要

针对多通道柔性神经微电极的设计及制作,研究了微电极的加工工艺.采用一种新型的柔性聚合物材料--聚对二甲苯(parylene C)作为微电极的基底和绝缘材料,借助微细加工技术,制作了36通道(按6×6矩阵排列)的柔性神经微电极,微电极的尺寸分别为Φ150 μm(圆形)和150 μm×150 μm(方形),电极引线线宽为30 μm.无论微电极为圆形或方形,表面均平整光滑、轮廓清晰.电学性能测试结果表明,1 kHz时微电极的阻抗仅为7 kΩ左右,且随着频率的增加,阻抗逐渐降低,呈明显高通特性.微电极加工质量较好,电学性能优良,实现了微电极和柔性基底的集成,有利于高效率批量制作,为视觉假体中柔性神经接口的研制奠定了基础.%Multichannel flexible neural microelectrodes were designed and fabricated,and their fabrication processes were also studied.A microfabrication technology was introduced to manufacture flexible microelectrodes based on a new flexible substrate material,parylene C,due to its excellent electrical insulating,mechanical and biocompatible properties,and a 36-channel flexible neural microelec-trode was fabricated with the arrangement in a 6 × 6 square grid pattern.The size of microelectrode was Φ150 μn (circular) and 150 μm×150 μm (squre),respectively,and the line width of metal trace was 30 μm.It was found that the microelcctrode shows a smooth surface and a distinct outline.A elec-trtical test indicates that the impedance of microelectrode is only 7 kΩ or so,and it reduceds as frequency increasing,which is an excellent high-pass behavior.Moreover,the microelectrode and a flexible substrate can be integrated by the microfabrication technology.The microelectrode is suitable for the application in retinal prostheses,for it has a good quality and excellent electrical properties.