线阵-面阵CCD三线阵立体测绘相机焦平面组件的研制

摘要

介绍了线阵-面阵CCD(LMCCD)制式相机的相关原理,提出实现LMCCD相机的关键在于相机焦平面组件的研制.给出了LMCCD相机焦平面组件在研制过程中的关键技术,如LMCCD像面基板与CCD的高精度拼接,焦平面组件电子学部分的低噪声、高集成度设计,焦平面组件在真空环境下的热噪声抑制和热传导设计,以及焦平面组件的装配和焊接等.最后,给出了研制和测试结果.LMCCD拼接的共面精度优于5 μm,平移量和平行度均优于2μm;在典型工作情况下,实验室测试信噪比优于90;在15 min的工作周期下,焦面组件的温度控制在30℃以下.这些结果满足LMCCD制式相机关于CCD拼接、焦面温度控制和信噪比的要求.%This paper introduces the working principles of Line-Matrix CCD( LMCCD) mapping cameras firstly and points out that the key step to realize the LMCCD camera is to develop focal plane modules. Some pivotal techniques used in the reality process of a LMCCD mapping space camera are introduced, such as stitching line and matrix CCDs together on an image base board in high precision, designing elements in high density and very low noise, controlling dark noises related to the temperature and the heat produced by the CCD under a vacuum environment, assembling the circuit board and the focal plane and soldering the CCD. Finally, it gives developing and experimental results of the LMCCD mapping camera. The results show that the stitching precision of line and matrix CCDs in co-planarity is better than 5 μm,and both the amounts of moving and parallelism are better than 2 μm. The Signal to Noise ratio(SNR) tested in laboratory is better than 90 under a typical working condi-tionCthe solar incidence angle is 30° and the reflectivity of the earth's surface is 0. 3). Furthermore, the temperature of the focal plane module can be controlled under 30℃ in a working period of 15 min. All of these results satisfy the requirements of the LMCCD for the CCD stitching, temperature control and the SNR.