自制了一个137单元分立促动器的连续镜面式变形镜,用于自适应光学相关技术的研究.首先,利用Zygo激光干涉仪对变形镜的静态性能进行了测试,包括面形测试、单个促动器的响应测试和耦合测试；然后,针对变形镜的校正能力,分别进行了Zernike多项式拟合和展平测试,并利用自适应光学实验平台实验验证了变形镜的校正能力；最后,利用搭建的快速响应测量平台测试了变形镜及其驱动电路的动态响应性能.测试及实验表明,137单元变形镜静态展平后的面形RMS值优于λ/50,PV值优于0.18λ(λ=632.8 nm)；能够对前7阶Zernike多项式进行较好的拟合和校正；变形镜及其高压驱动器的动态响应优于1 kHz;该变形镜能使系统的Strehl ratio从小于0.1提高到优于0.9,明显改善了系统的成像能力.%A 137-element Deformable Mirror(DM) was manufactured by ourselves to carry out the research on the adaptive optics. First, a Zygo interferometer was used to test the static characteristics of the DM, which included figure tests, response tests of single actuators and coupling tests. Then, Zernike polynomial fitting and surface flattening were performed to test the correction capability of the DM, respectively, and the correction capability was also verified experimentally at an adaptive optics test-bed. Finally, a fast response measurement system was built up to test the dynamic response abilities of the DM and its drive electronics. The tests and experiments show that the surface of the DM after flatten calibration has the RMS and PV better than λ/50 and 0.18λ(λ = 632.8 nm), respectively. Furthermore, the DM can fit and correct the first 7 order Zernike polynomials reasonably. The dynamic responses both of the DM and its high voltage driver are faster than 1 kHz. The tests in the indoor adaptive optics system show that the DM improves the system's Strehl ratio from less than 0.1 to better than 0.9, which enhances the imaging capability of the system greatly.
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