磁过滤真空弧等离子体钛沉积膜改善H13钢腐蚀机理的研究

摘要

Titanium films were deposited with magnetically filteredvacuum-arc plasma source on H13 steel substrates. The deposited film was studied by TEM. The crystalline beard of microstructure was observed in the deposited layer. The electrochemical measurements indicated that the corrosion current density of the deposited samples decreased by 1—2 orders compared with that of the H13 steels， and hence the corrosion resistance properties of H13 steel were be improved with the Ti deposition. Ion implantation could further improve corrosion resistance properties of deposited samples. The morphology of corroded samples was observed by SEM, and the mechanism of corrosion resistance of deposited samples was also discussed.%利用磁过滤真空弧等离子体沉积成膜系统,在H13钢基体上沉积一层360nm的钛膜。透射电镜（TEM）分析结果表明，沉积膜膜层的微观结构呈晶须状。在pH=5.6的NaAc/HAc缓冲液中阳极极化扫描曲线测量表明,沉积膜样品的腐蚀电流密度峰值较H13钢降低1—2个数量级,抗腐蚀性能大幅度提高,离子注入进一步降低了沉积膜样品的峰值腐蚀电流密度,提高了沉积膜样品的抗腐蚀性。SEM对腐蚀样品的表面形貌进行了分析,并对沉积膜样品的抗腐蚀机理进行了研究。