[1]Center for Nanochemistry (CNC), Beijing Science and Engineering Center for Nanocarbons, College of Chemistry and Molecular Engineering, Peking University, Beijing 100871, China;
[2]Key Laboratory of Opto-electronics Technology, Ministry of Education, Beijing University of Technology, Beijing 100124, China;
[3]State Key Laboratory of Solid-State Lighting, Institute of Semiconductors, Chinese Academy of Sciences, Bei]ing 100083, China;
[4]Department of Materials Science and Engineering, College of Engineering, Peking University, Beijing 100871, China;
[5]Department of Chemistry and Center for Nano and Micro Mechanics, Tsinghua University, Beijing 100084, China;
化学气相沉积法; 玻璃基板; 均匀生长; 气体流动; 石墨; 应用; 化学气相沉积技术; 生长质量;