KDP晶体超精密加工机床主轴系统模态分析

摘要

KDP crystal machining accuracy of ultra-precision machine tool is closely related to the vibration of the spindle system.In order to solve the problem of KDP crystal ultra-precision machine tool,which include poor stability and difficult to ensure accuracy,using ANSYS Workbench software to establish three-dimensional finite element model of spindle system model.Modal shape of the first six order was acquired by modal analysis method,and the relationship between the spindle system modal frequencies and mode shapes was researched.Finally, the spindle system experimental modal analysis is carried out, and the basic agreement between experimental results and finite element analysis, the maximum error is 4.9%, which verifies the correctness of the finite element analysis results.So it lays a foundation for optimal design and lightweight research of the spindle system of KDP crystal ultra-precision machine tool.%KDP晶体超精密加工机床的加工精度与主轴系统的振动存在着密切的联系.为了解决KDP晶体超精密加工机床的加工稳定性差、精度难以保证的问题,利用ANSYS Workbench软件建立了主轴系统的三维有限元模型,在此基础上对机床主轴系统进行模态分析,得到主轴系统的前6阶模态频率和振型并分析了主轴系统的模态频率及振型之间的关系.最后对主轴系统进行模态实验,实验结果与有限元分析之间基本吻合,最大误差为4.9%,验证了有限元分析结果的可靠性,为KDP晶体超精密加工机床主轴系统的优化设计以及轻量化研究奠定了基础.