MOPA准分子激光全固化电源同步模块的设计

摘要

A FPGA-based synchronization module designed for MOPA (master oscillator power amplifier) excimer laser SSPPM (solid state pulsed power module) is introduced. It was designed and synthesized with VHDL under the IDE of Altera Quartus II. An ideal simulation was conducted with software ModelSim. The system synchronization timing jitter is no more than rb3. 3 ns when operation frequency is 300 MHz, which meets the requirements of system design. It lias the characteristics of small size, high reliability, and conveniences of system verification, improvement and integration, compared with the traditional system.%介绍了一种基于可编程逻辑器件FPGA的主振荡-功率放大(MOPA)准分子激光全固化脉冲电源同步模块.在QuartusⅡ环境下采用VHDL语言完成设计和综合,使用ModelSim软件进行仿真.当采用300 MHz工作频率时,系统同步抖动不大于±3.3 ns,满足系统设计要求.与传统系统相比,该系统具有体积小、可靠性高、便于验证修改和系统集成的优点.