间接连接型音叉振动式微机械陀螺的性能变异分析

摘要

An indirect connection tuning-fork vibratory microgyroscope is presented,focusing on the effects of the key parameters performance variation caused by fabrication error for the final output of the detection capacitance.By the introduction of the working principle and the dynamical analysis of this microgyroscope,the equations of total detection capacitance are obtained.The simulation results show that the variation of the stiffness of the detection mode for suspension system is the most important and must pay more attention to the fabrication of the sensing suspension.The work in the study has an important reference value to increase the performance of the indirect connection tuning-fork vibratory microgyroscope.%以一种间接连接型音又振动式微机械陀螺为研究对象,分析了加工误差引起的关键参数的性能变异对检测输出电容的影响.通过对这种微机械陀螺的检测原理介绍并对其动力学进行分析,获得了误差检测模型输出电容表达式.结果表明,这种微机械陀螺检测微弹性梁弹性系数的变异引起的不对称对系统输出具有较大的影响,加工中对检测微弹性梁应引起足够的重视.工作为间接连接型音叉振动式微机械陀螺加工性能的提高具有一定的参考价值.