School of Physics and Optoelectronic Engineering;
Hangzhou Institute for Advanced Study;
University of Chinese Academy of Sciences;
Hangzhou 310024;
China;
State Key Laboratory of Infrared Physics;
Shanghai Institute of Technical Physics;
Chinese Academy of Sciences;
Shanghai 200083;
China;
University of Chinese Academy of Sciences;
100049 Beijing;
China;
Institute of Intelligent Machines;
HFiPS;
Chinese Academy of Sciences;
Hefei 230031;
China;
Jianghuai Frontier Technology Coordination and Innovation Center;
Hefei 230088;
China;
Institute of Microelectronics Technology and High-Purity Materials;
Russian Academy of Sciences;
ChernogolovkaMoscow district;
142432;
Russia;