为了检测硬盘盘片表面疵病的大小是否符合标准,设计了一种检测装置.采用光的散射理论,结合硬盘盘片表面疵病的粗糙度等级和实验结果,利用光照射到粗糙表面时发生的散射现象、散射光的特性以及散射模型建立的理论基础,对4种散射模型进行了分析和比较.并以混合型散射模型为基础,利用光学设计软件完成了该检测装置的光学系统设计.结果表明,混合型散射模型的散射角最大、散射能量密度最大,最适合用于反映硬盘盘片表面疵病造成的散射现象.%In order to detect whether the surface defect grade of a hard disk platter meet the standard, a detection device was designed according to scattering theory of light, experimental result and roughness grade of the hard disk platter surface defects. Four models of surface scattering were discussed based on scattering phenomenon when light incident on rough surfaces, scattering property and model constitution of scattering objects. With the help of an optical design software, the optical system of detection device was designed based on mixed scattering model. The results indicated scattering angle and scattering power density of mixed type was maximum, so it was optimum to reflect scattering phenomenon of the hard disk platter surface defects.
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