基于MEMS方块谐振器的10 MHz振荡器

摘要

The quality factor of square Micro Electromechanical System(MEMS) resonator is very high, whereas the insertion loss is very big. In order to obtain MEMS oscillator with low phase noise, the quality factor of square resonator is further improved, and the insertion loss is lowered. By reasonable designing, the exact support beam locations can minimize the anchor loss,and the proposed resonator achieves very high quality factor. The design method of Second-Mode Face Shear Square Micromechanical Resonator bears many advantages: higher quality factor and lower dynamic resistance(reaches 82.1Ω at 0.25μm gap). The oscillator based on this newly designed resonator achieves a lower phase noise: -156 dBc/Hz @1 kHz.%方块谐振器的品质因数(Q)很高，但是插入损耗也很大。为了得到低相噪的微机电系统(MEMS)振荡器，需要进一步提高方块谐振器的 Q值，降低谐振器的插入损耗。通过支撑梁位置的合理设计可以达到极小的锚点损耗，从而实现非常高的品质因数。采用二阶面切变模态方块谐振器的设计方法，表现出了很多的优越性：Q 值更高，动态电阻更小(在间隙为0.25μm 时达到82.1Ω)。基于这种新型谐振器设计出的振荡器实现的相位噪声为：–156 dBc/Hz@1 kHz。